Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals

Klimovskaya, А.I. and Sarikov, A.T. and Pedchenko, Yu.M. and Voroshchenko, A. and Lytvyn, O.S. and Stadnik, A.A. (2011) Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals Nanoscale Research Letters , 6 (1). p. 151. ISSN 1556-276X (electronic version)

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Abstract

In this study, the peculiarities of the transformations of gold films deposited on the Si wafer surfaces as a result of high temperature anneals are investigated experimentally depending on the conditions of wafer surface preparation and the annealing regimes. The morphology and the distribution functions of the crystallites of gold films as well as the gold droplets formed as a result of anneals are studied as functions of annealing temperature, type of annealing (rapid thermal or rapid furnace annealing), and the state of the surface of Si wafers. The results obtained can be used for the controlled preparation of the arrays of catalytic gold droplets for subsequent growth of Si wire-like crystals.

Item Type: Article
Uncontrolled Keywords: arrays of catalytic gold droplets; high temperature anneal; atomic force microscopy
Subjects: Статті у журналах > Наукові (входять до інших наукометричних баз, крім перерахованих, мають ISSN, DOI, індекс цитування)
Divisions: Інститути > Інститут суспільства > Кафедра інформаційних технологій і математичних дисциплін > Кафедра інформатики
Depositing User: Оксана Степанівна Литвин
Date Deposited: 30 Sep 2013 14:02
Last Modified: 20 Nov 2015 13:34
URI: https://elibrary.kubg.edu.ua/id/eprint/2240

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