Metrology analysis and metrology providing of atomic force microscopy

Надорожняк, Х.О. and Витвицька , Л.А. and Литвин, Оксана Степанівна and Середюк, Орест Євгенович and Прокопенко, Інна Володимирівна (2011) Metrology analysis and metrology providing of atomic force microscopy Методи та прилади контролю якості, 26 (26). pp. 77-84. ISSN 1993-9981

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Abstract

Grounded necessity of development and introduction of standards in relation to the metrology providing of scanning probe microscopes as most perspective facilities of measuring technique in the area of nanotechnology and their using for the certification, inspection proof-testing. The metrology analysis of atomic force microscope of NanoScope IlІa Dimension 3000 is conducted, its metrology model and method and facilities of its calibration is developed. On the basis of experimental information variations of values of surfaces geometrical parameters are determined in the nanometric range of 3D-measurement, caused by influence of different sources of uncertainty

Item Type: Article
Uncontrolled Keywords: atomic force microscopy; uncertainty; metrology analysis; calibration; 3D-measurement; nanotechnology
Subjects: Articles in journals > Фахові (входять до переліку фахових, затверджений МОН)
Divisions: Institutes > Institute of Society > Chair of Information Technologies and Mathematics > Chair of Computer Science
Depositing User: Оксана Степанівна Литвин
Date Deposited: 24 Sep 2013 07:56
Last Modified: 25 Nov 2015 08:57
URI: http://elibrary.kubg.edu.ua/id/eprint/2113

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